Laser writing of glassy carbon features on Si from liquid toluene

Applied Surface Science

Volumn 138-139, Issue 1-4, 1999, Pages 461-464

  Shafeev, G A ^a   Simakin, A V ^a   Lyalin, A A ^a   Obraztsova, E D ^a   Frolov, V D ^a  

^a PROKHOROV GENERAL PHYSICS INSTITUTE   (Russian Federation)

Author keywords

Glassy carbon; Laser writing; Liquid toluene; Si

Indexed keywords

EID: 0001737192     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(98)00440-1     Document Type: Article

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