A structure of bistable electromagnetic actuated microvalve fabricated on a single wafer, implementing the SLA and PDMS technique

American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)

Volumn 5, Issue , 2003, Pages 411-417

  Bintoro, Jemmy Sutanto ^a   Luharuka, Rajesh ^a   Wong, Edward W ^a   Hesketh, Peter J ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; LITHOGRAPHY; MAGNETOELECTRIC EFFECTS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; POWER GENERATION; PRINTED CIRCUIT BOARDS; VALVES (MECHANICAL);

ELECTRMAGNETIC ACTUATED MICROVALVES; MICROVALVES; STEREO LITHOGRAPHY (SLA);

MECHANICAL ENGINEERING;

EID: 1942424056     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/imece2003-43857     Document Type: Conference Paper

References (24)

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