The use of a biomolecular target for crystalline carbon nitride film deposition by Ar ion-beam sputtering without any other source of nitrogen

Applied Physics Letters

Volumn 72, Issue 26, 1998, Pages 3449-3451

  Chen, L C ^a   Lu, T R ^b   Kuo, C T ^b   Bhusari, D M ^c   Wu, J J ^c   Chen, K H ^c   Chen, T M ^b  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^c INSTITUTE OF ATOMIC AND MOLECULAR SCIENCES   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000454396     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.121662     Document Type: Article

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