Diamond-like carbon films prepared by facing-target sputtering

Thin Solid Films

Volumn 420-421, Issue , 2002, Pages 172-176

  Shi, J R ^a   Wang, J P ^a  

^a DATA STORAGE INSTITUTE   (Singapore)

Author keywords

Diamond like carbon; Facing target sputtering; Raman scattering

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELLIPSOMETRY; ENERGY GAP; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PROTECTIVE COATINGS; RAMAN SPECTROSCOPY; SPUTTER DEPOSITION;

FACING-TARGET SPUTTERING;

DIAMOND LIKE CARBON FILMS;

EID: 0037011031     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00794-0     Document Type: Conference Paper

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