Optical and structural properties of nitrogen doped amorphous carbon films grown by rf plasma-enchanced CVD

Diamond and Related Materials

Volumn 10, Issue 3-7, 2001, Pages 1002-1006

  Hayashi, Y ^a   Krishna, K M ^a   Ebisu, H ^a   Soga, T ^a   Umeno, M ^a   Jimbo, T ^a  

^a NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Diamond like carbon; n type doping; Nitrogen; Spectroscopy

Indexed keywords

CHEMICAL VAPOR DEPOSITION; NITROGEN; OPTICAL PROPERTIES; PARAMAGNETIC RESONANCE; RAMAN SPECTROSCOPY; ULTRAVIOLET SPECTROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

FLOW RATES;

DIAMOND LIKE CARBON FILMS;

DIAMOND-LIKE CARBON;

EID: 0035270017     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(00)00566-5     Document Type: Article

References (21)

1. Yoshimi M., Shimizu H., Hattori K. Optoelectron. Dev. Technol. 7:1992;69.
2. Kim S.B., Wager J.F. Appl. Phys. Lett. 53:1988;1880.
3. Tsai H.C., Bogy D.B. J. Vac. Sci. Technol. A. 5:1987;3287.
4. Yu H.A., Kaneko Y., Yoshimura S., Otani S. Appl. Phys. Lett. 68:1996;547.
5. Krishna K.M., Soga T., Jimbo T., Umeno M. Carbon. 37:1999;531.
6. Hayashi Y., Hagimoto K., Ebisu H., Kalaga M.K., Soga T., Umeno M., Jimbo T. Jpn. J. Appl. Phys. 39:2000;4088.
7. Silva S.R.P., Rafferty B., Amaratunga G.A.J., Schwan J., Franceschini D.F., Brown L.M. Diamond Relat. Matter. 5:1996;401.
8. Zhang M., Nakayama Y., Harada S. J. Appl. Phys. 86:1999;4971.
9. Ilie A., Harel O., Conway N.M.J., Yagi T., Robertson J., Milne W.I. J. Appl. Phys. 87:2000;789.
10. Ren Z.-M., Du Y.-C., Qiu Y., et al. Phys. Rev. B. 51:1995;5274.
11. Sitch P.L., Köhler T., Jungnickel G., Porezag D., Frauenheim T. Solid State Commun. 100:1996;549.
12. Stumm P., Drabold D.A., Fedders P.A. J. Appl. Phys. 81:1997;1289.
13. Ronning C., Feldermann H., Merk R., Hofsäss H., Reinke P., Thiele J.-U. Phys. Rev. B. 58:1998;2207.
14. Kobayashi S., Nozaki S., Morisaki H., Fukui S., Masaki S. Thin Solid Films. 281-282:1996;289.
15. Xin H., Lin C., Zhu S., Zou S., Shi Z., Hemment P.L.F. Nucl. Instrum. Methods Phys. Res. B. 103:1995;309.
16. Street R.A. Hydrogenated Amorphous Silicon. 1991;86 Cambridge University Press, Cambridge.
17. Robertson J., O'Reilly E.P. Phys. Rev. B. 35:1987;2946.
18. Fusco G., Tagliaferro A., Milne W.I., Robertson J. Diamond Relat. Matter. 6:1997;783.
19. Barklie R.C., Collins M., Cunniffe J., Silva S.R. Diamond Relat. Matter. 7:1998;864.
20. Barklie R.C., Collins M., Silva S.R. Phys. Rev. B. 61:2000;3456.
21. Robertson J. Adv. Phys. 35:1986;317.