Ultraviolet and visible Raman studies of nitrogenated tetrahedral amorphous carbon films

Thin Solid Films

Volumn 366, Issue 1-2, 2000, Pages 169-174

  Shi, J R ^a   Shi, X ^a   Sun, Z ^a   Liu, E ^a   Tay, B K ^a   Lau, S P ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CHEMICAL BONDS; ION BEAMS; MOLECULAR VIBRATIONS; RADIOFREQUENCY SPECTROSCOPY; RAMAN SCATTERING; THERMODYNAMIC STABILITY; ULTRAVIOLET INSTRUMENTS;

AMORPHOUS CARBON FILMS; FILTERED CATHODIC VACUUM ARC; NITROGEN IONS;

AMORPHOUS FILMS;

EID: 0034188614     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)00732-X     Document Type: Article

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