CMOS monolithic mechatronic microsystem for surface imaging and force response studies

IEEE Journal of Solid-State Circuits

Volumn 40, Issue 4, 2005, Pages 951-958

  Barrettino, Diego ^a,b   Hafizovic, Sadik ^a   Volden, Tormod ^a   Sedivy, Jan ^a,c   Kirstein, Kay Uwe ^a   Hierlemann, Andreas ^a  

^a ETH ZURICH   (Switzerland)

^b University of Washington   (United States)

^c CZECH TECHNICAL UNIVERSITY IN PRAGUE   (Czech Republic)

Author keywords

Atomic force microscopy; CMOS based micro system; Force sensors; MEMS

Indexed keywords

ANALOG TO DIGITAL CONVERSION; ATOMIC FORCE MICROSCOPY; CMOS INTEGRATED CIRCUITS; CONTROL EQUIPMENT; IMAGING TECHNIQUES; MICROBIOLOGY; MICROELECTRONICS; OPTICAL RESOLVING POWER;

CMOS-BASED MICRO SYSTEMS; FORCE SENSORS; MEMS; SCANNING-TUNNELING MICROSCOPE (STM);

MECHATRONICS;

EID: 18744390382     PISSN: 00189200     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSSC.2004.842868     Document Type: Conference Paper

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