Generalized ellipsometry of complex mediums in layered systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4806, Issue , 2002, Pages 264-276

  Schubert, Mathias ^a,b   Kasic, Alexander ^a,b   Hofmann, Tino ^a,b   Gottschalch, Volker ^a   Off, Jürgen ^c   Scholz, Ferdinand ^c   Schubert, Eva ^d   Neumann, Horst ^d   Hodgkinson, Ian ^e   Arnold, Matthew ^e   Dollase, Wayne ^f,g   Herzinger, Craig M ^h  

^a UNIVERSITY OF LEIPZIG   (Germany)

^b UNIVERSITY OF NEBRASKA LINCOLN   (United States)

^c UNIVERSITY OF STUTTGART   (Germany)

^d LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

^e UNIVERSITY OF OTAGO   (New Zealand)

^f UNIVERSITY OF CALIFORNIA   (United States)

^g UNIVERSITÄT BAYREUTH   (Germany)

^h J A WOOLLAM CO INC   (United States)

Author keywords

Anisotropic optical constants; Bulk and thin film birefringence; Generalized ellipsometry; Optical Jones matrix; Phonon modes

Indexed keywords

ANISOTROPY; BIREFRINGENCE; DIELECTRIC PROPERTIES; GALLIUM NITRIDE; LIGHT ABSORPTION; OPTICAL PROPERTIES; SAPPHIRE; SINGLE CRYSTALS; TENSORS; THIN FILMS; TITANIUM DIOXIDE;

ANISOTROPIC LAYERED SYSTEMS;

ELLIPSOMETRY;

EID: 18644383485     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.472993     Document Type: Article

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