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Volumn 75, Issue 3, 2004, Pages 719-724

Synthesis of aluminum nitride films by plasma immersion ion implantation-deposition using hybrid gas-metal cathodic arc gun

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; CATHODES; CRYSTALLINE MATERIALS; DEPOSITION; ION IMPLANTATION; MICROSTRUCTURE; MOLECULAR BEAM EPITAXY; NITROGEN; OXYGEN; PLASMA SOURCES; SILICON WAFERS; SURFACE ROUGHNESS; SYNTHESIS (CHEMICAL); THIN FILMS;

EID: 1842554783     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1646741     Document Type: Article
Times cited : (9)

References (36)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.