Effects of cathode materials and arc current on optimal bias of a cathodic arc through a magnetic duct

Applied Physics Letters

Volumn 80, Issue 20, 2002, Pages 3700-3702

  Zhang, Tao ^a   Chu, Paul K ^b   Brown, Ian G ^c  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

^b BEIJING NORMAL UNIVERSITY   (China)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARC CURRENT; CATHODE MATERIALS; CATHODIC ARC; CATHODIC ARC PLASMA; COLLECTING PLATES; ION CURRENTS; ION KINETIC ENERGY; ION MASS; MAXIMUM EFFICIENCY; PLASMA TRANSPORT;

CATHODES; DUCTS; IONS; MAGNETIC FIELD EFFECTS; MAGNETISM; OPTIMIZATION; PLASMA DENSITY;

MAGNETOPLASMA;

EID: 79956032508     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1481235     Document Type: Article

References (14)

1. R. L. Boxman and S. Goldsmith, IEEE Trans. Plasma Sci. 17, 705 (1989). tps ITPSBD 0093-3813
2. A. Anders, Surf. Coat. Technol. 93, 158 (1998). sct SCTEEJ 0257-8972
3. J. Vyskocil and J. Musil, J. Vac. Sci. Technol. A 10, 1740 (1992). jva JVTAD6 0734-2101
4. A. Anders, S. Anders, and I. G. Brown, J. Appl. Phys. 75, 4900 (1994). jap JAPIAU 0021-8979
5. T. Zhang, B. Y. Tang, Q. C. Chen, Z. M. Zeng, P. K. Chu, M. M. M. Bilek, and I. G. Brown, Rev. Sci. Instrum. 70, 3329 (1999). rsi RSINAK 0034-6748
6. M. M. M. Bilek and A. Anders, Plasma Sources Sci. Technol. 8, 488 (1999). pst PSTEEU 0963-0252
7. M. Keidar, I. I. Beilis, and R. L. Boxman, IEEE Trans. Plasma Sci. 24, 226 (1996). tps ITPSBD 0093-3813
8. M. M. M. Bilek, D. R. McKenzie, Y. Yin, M. Chowalla, and W. I. Milne, IEEE Trans. Plasma Sci. 24, 1291 (1996). tps ITPSBD 0093-3813
9. T. Zhang, Y. C. Zhang, P. K. Chu, and I. G. Brown, Appl. Phys. Lett. 80, 365 (2002). apl APPLAB 0003-6951
10. G. Y. Yushkov, A. Anders, E. M. Oks, and I. G. Brown, J. Appl. Phys. 88, 5618 (2000). jap JAPIAU 0021-8979
11. I. G. Brown, Rev. Sci. Instrum. 65, 3061 (1994). rsi RSINAK 0034-6748
12. F. J. Paoloni and I. G. Brown, Rev. Sci. Instrum. 66, 3855 (1995). rsi RSINAK 0034-6748
13. A. Anders, G. Yushkov, E. Oks, A. Nikolaev, and I. G. Brown, Rev. Sci. Instrum. 69, 1332 (1998). rsi RSINAK 0034-6748
14. E. M. Oks, A. Anders, I. G. Brown, M. R. Dickinson, and R. A. MacGill, IEEE Trans. Plasma Sci. 24, 1174 (1996). tps ITPSBD 0093-3813