Polycrystalline SiGe technology for uncooled microbolometer arrays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5209, Issue , 2003, Pages 107-116

  Leonov, Vladimir N ^a   Goessens, Claus ^a   Van Hoof, Chris ^a   Grietens, Bob ^b   Perova, Natalia A ^b   Malyutenko, Volodymyr ^c  

^a IMEC   (Belgium)

^b XenICs   (Belgium)

^c Institute of Semiconductor Physics   (Ukraine)

Author keywords

Infrared; Infrared emitter; Linear array; Microbolometer; Poly SiGe; Small focal plane array; Thermal detector; Thermal imaging; Uncooled

Indexed keywords

COMPUTER SIMULATION; DETECTORS; INFRARED IMAGING; MATHEMATICAL MODELS; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON COMPOUNDS; TRANSFER FUNCTIONS;

INFRARED EMITTERS; LINEAR ARRAYS; MICROBOLOMETER ARRAYS; THERMAL DETECTORS;

BOLOMETERS;

EID: 1842530400     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.505836     Document Type: Conference Paper

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