Science and technology of ultrananocrystalline diamond (UNCD) thin films for multifunctional devices

Proceedings of SPIE- The International Society for Optical Engineering

Volumn 4235, Issue , 2001, Pages 10-20

  Auciello, O ^a   Gruen, D M ^a   Krauss, A R ^a   Jayatissa, A ^a   Sumant, A ^a   Tucek, J ^a   Mancini, D C ^a   Moldovan, N ^a   Erdemir, A ^a   Ersoy, D ^a   Gardos, M N ^a   Busmann, H G ^a   Meyer, E M ^a  

^a ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

Coatings; Low friction; Low wear; Microelectromechanical systems (MEMS); Ultrananocrystalline diamond

Indexed keywords

CHEMICAL VAPOR DEPOSITION; FRACTURE TOUGHNESS; GRAIN SIZE AND SHAPE; MICROELECTROMECHANICAL DEVICES; NANOSTRUCTURED MATERIALS; SILICON; STRENGTH OF MATERIALS; ULTRATHIN FILMS;

ULTRANANOCRYSTALLINE DIAMOND (UNCD) THIN FILMS;

DIAMOND FILMS;

EID: 17844375391     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.420857     Document Type: Article

References (45)

1. Materials science of microelectromechanical systems (MEMS) devices II