Iterative control of dynamics-coupling effects in piezo-based nano-positioners for high-speed AFM

Proceedings of the IEEE International Conference on Control Applications

Volumn 1, Issue , 2004, Pages 711-717

  Tien, Szuchi ^a   Zou, Qingze ^a   Devasia, S ^a  

^a UNIVERSITY OF WASHINGTON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COUPLING ERRORS; HIGH-SPEED OPERATION; ITERATIVE CONTROL; POSITIONING ERRORS;

ACTUATORS; ATOMIC FORCE MICROSCOPY; COMPUTATIONAL METHODS; ERROR ANALYSIS; FEEDBACK CONTROL; IMAGING SYSTEMS; ITERATIVE METHODS; NANOTECHNOLOGY;

CONTROL SYSTEM ANALYSIS;

EID: 17744368739     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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