Localized laser assisted eutectic bonding of quartz and silicon by Nd:YAG pulsed-laser

Sensors and Actuators, A: Physical

Volumn 120, Issue 2, 2005, Pages 550-561

  Tan, A W Y ^a   Tay, F E H ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Eutectic; Gold tin; Laser bonding; Low temperature; Packaging; Single crystal quartz to silicon

Indexed keywords

EUTECTICS; LIGHT SOURCES; MICROELECTROMECHANICAL DEVICES; NEODYMIUM COMPOUNDS; PARAMETER ESTIMATION; QUARTZ; SILICON; SINGLE CRYSTALS;

GOLD-TIN; LASER BONDING; LOW TEMPERATURE; SINGLE CRYSTAL QUARTZ-TO-SILICON;

SOLID STATE LASERS;

EID: 17644399443     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.11.035     Document Type: Article

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