Locally selective bonding of silicon and glass with laser

Sensors and Actuators, A: Physical

Volumn 93, Issue 1, 2001, Pages 63-69

  Wild, M J ^a   Gillner, A ^a   Poprawe, R ^a  

^a FRAUNHOFER INSTITUTE FOR LASER TECHNOLOGY   (Germany)

Author keywords

Glass; Laser; Selective; Silicon; Temperature; Wafer bonding

Indexed keywords

CHARACTERIZATION; CORRELATION METHODS; GLASS; IRRADIATION; LASER APPLICATIONS; NEODYMIUM LASERS; SILICON; TEMPERATURE; TEMPERATURE MEASUREMENT;

ANODIC BONDING TECHNOLOGY; GLASS WAFERS; LOCALLY SELECTIVE BONDING;

SILICON SENSORS;

EID: 0035948964     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00622-7     Document Type: Article

References (13)

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