Laser joining of glass with silicon

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4637, Issue , 2002, Pages 487-495

  Witte, Reiner ^a   Herfurth, Hans ^a   Heinemann, Stefan ^a  

^a Fraunhofer Center for Laser Technology   (United States)

Author keywords

Glass; MEMS; Selective bonding; Silicon

Indexed keywords

ADHESIVES; BOND STRENGTH (MATERIALS); GLASS BONDING; HERMETIC SEALS; JOINING; MICROELECTROMECHANICAL DEVICES; OPTOELECTRONIC DEVICES; PARAMETER ESTIMATION; SILICON;

LASER JOINING; MICROSYSTEMS;

LASER BEAM EFFECTS;

EID: 0036405309     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.470657     Document Type: Conference Paper

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