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Volumn 186, Issue 1-2 SPEC. ISS., 2004, Pages 118-124

Synthesis of nitrogen incorporated carbon films by plasma immersion ion implantation and deposition

Author keywords

Carbon nitride films; Optical band gap; Raman spectrum; X ray photoelectron spectrum

Indexed keywords

ENERGY GAP; INFRARED SPECTROSCOPY; ION IMPLANTATION; NITROGEN; PARTIAL PRESSURE; PLASMAS; PLASTIC DEFORMATION; RAMAN SPECTROSCOPY; SPECTROPHOTOMETERS; SYNTHESIS (CHEMICAL);

EID: 17644372004     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2004.04.040     Document Type: Article
Times cited : (34)

References (25)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.