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Volumn 186, Issue 1-2 SPEC. ISS., 2004, Pages 118-124
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Synthesis of nitrogen incorporated carbon films by plasma immersion ion implantation and deposition
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Author keywords
Carbon nitride films; Optical band gap; Raman spectrum; X ray photoelectron spectrum
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Indexed keywords
ENERGY GAP;
INFRARED SPECTROSCOPY;
ION IMPLANTATION;
NITROGEN;
PARTIAL PRESSURE;
PLASMAS;
PLASTIC DEFORMATION;
RAMAN SPECTROSCOPY;
SPECTROPHOTOMETERS;
SYNTHESIS (CHEMICAL);
CARBON FILMS;
ELASTIC DEFORMATION;
OPTICAL BAND GAPS;
PLASMA IMMERSION;
DIAMOND LIKE CARBON FILMS;
PLASMA TREATMENT;
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EID: 17644372004
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2004.04.040 Document Type: Article |
Times cited : (34)
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References (25)
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