Influence of ions energy on the bonding structure of amorphous carbon nitride films

Materials Chemistry and Physics

Volumn 70, Issue 2, 2001, Pages 245-248

  Wei, Aixiang ^a   Chen, Dihu ^b   Zhou, Youguo ^a   Lin, Peixing ^a   Yang, Zenghong ^a   Fan, Jiahai ^a  

^a Guangzhou Naval Academy   (China)

^b SUN YAT SEN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NITRIDE; ELECTRIC FIELD EFFECTS; FILM PREPARATION; ION BOMBARDMENT; MAGNETIC FILTERS; PLASMA APPLICATIONS; RAMAN SCATTERING;

BONDING STRUCTURES;

AMORPHOUS FILMS;

EID: 0035341606     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0254-0584(00)00497-1     Document Type: Article

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