Effect of nitrogen incorporation into diamond-like carbon films by ECR-CVD

Diamond and Related Materials

Volumn 8, Issue 2-5, 1999, Pages 472-476

  Fung, M K ^a   Chan, W C ^a   Gao, Z Q ^a   Bello, I ^a   Lee, C S ^a   Lee, S T ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Chemical vapor deposition; Cyclotron resonance; Diamond like carbon; Nitrogen

Indexed keywords

CARBON; CHEMICAL BONDS; CROSSLINKING; ELECTRON CYCLOTRON RESONANCE; GLASS; HARDNESS; MICROWAVES; NITROGEN; PHASE COMPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY; SILICON;

DIAMOND-LIKE CARBON FILMS;

AMORPHOUS FILMS;

EID: 0032614772     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00334-3     Document Type: Article

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