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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 2, 2000, Pages 1027-1030

Effect of nitrogen doping on field emission characteristics of patterned diamond-like carbon films prepared by pulsed laser deposition

(2) Shin, I H a Lee, T D a

a Korea Advanced Institute of Science and Technology (KAIST) (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ADDITION REACTIONS; AMORPHOUS FILMS; CHEMICAL BONDS; COMPOSITION EFFECTS; CURRENT DENSITY; DEPOSITION; DOPING (ADDITIVES); FOURIER TRANSFORM INFRARED SPECTROSCOPY; NITROGEN; PULSED LASER APPLICATIONS; REACTION KINETICS;

DIAMOND-LIKE CARBON FILMS; PULSED LASER DEPOSITION;

FIELD EMISSION CATHODES;

EID: 0034156325 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.591320 Document Type: Article

Times cited : (13)

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