Simulations of ponderomotive effects in inductively coupled plasmas

Physics of Plasmas

Volumn 12, Issue 3, 2005, Pages 1-7

  Sydorenko, D Y ^a   Smolyakov, A I ^a   Tyshetskiy, Y O ^a,c   Godyak, V A ^b  

^a UNIVERSITY OF SASKATCHEWAN   (Canada)

^b OSRAM SYLVANIA   (United States)

^c INRS EMT   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

MILLER FORCE; PLASMA SLABS; PONDERMOTIVE EFFECTS; PONDERMOTIVE FORCE (PMF);

BOUNDARY CONDITIONS; CARRIER CONCENTRATION; COMPUTER SIMULATION; ELECTROMAGNETIC FIELD EFFECTS; ELECTROMAGNETIC WAVES; ELECTRON ENERGY LEVELS; INTEGRAL EQUATIONS; KINETIC THEORY; MAXWELL EQUATIONS; PERMITTIVITY; TRANSPORT PROPERTIES; VACUUM APPLICATIONS; VELOCITY CONTROL;

INDUCTIVELY COUPLED PLASMA;

EID: 17044416779     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1849797     Document Type: Article

References (32)

1. E. V. Gaponov and M. E. Miller, Sov. Phys. JETP 25, 952 (1958).
2. F. F. Chen, Introduction to Plasma Physics (Plenum, New York, 1974).
3. R. H. Cohen and T. D. Rognlien, Phys. Plasmas 3, 1839 (1996).
4. R. H. Cohen and T. D. Rognlien, Plasma Sources Sci. Technol. 5, 442 (1996).
5. V. Godyak, R. Piejak, B. Alexandrovich, and A. Smolyakov, Plasma Sources Sci. Technol. 10, 459 (2001).
6. V. A. Godyak, R. B. Piejak, B. M. Alexandrovich, and V. I. Kolobov, Phys. Plasmas 6, 1804 (1999).
7. A. I. Smolyakov, V. A. Godyak, and Y. O. Tyshetskiy, Phys. Plasmas 10, 2108 (2003).
8. V. Godyak, Plasma Phys. Controlled Fusion 45, A399 (2003).
9. A. V. Vasenkov and M. J. Kushner, Phys. Rev. E 66, 066411 (2002).
10. A. V. Vasenkov and M. J. Kushner, J. Appl. Phys. 94, 2223 (2003).
11. T. W. Johnston, RCA Rev. 17, 571 (1960).
12. R. E. Aamodt and M. C. Vella, Phys. Rev. Lett. 39, 1273 (1977).
13. P. Mora and R. Pellat, Phys. Fluids 22, 2408 (1979).
14. I. D. Kaganovich, Tech. Phys. Lett. 19, 276 (1993).
15. G. W. Kentwell and D. A. Jones, Phys. Rep. 145, 319 (1987).
16. E. S. Weibel, Phys. Fluids 10, 741 (1967).
17. A. N. Kondratenko, Field Penetration into Plasmas (Atomizdat, Moscow, 1979), in Russian.
18. V. I. Kolobov and D. J. Economou, Plasma Sources Sci. Technol. 6, R1 (1997).
19. M. M. Turner, Phys. Rev. Lett. 71, 1844 (1993).
20. K. C. Shaing, Phys. Plasmas 3, 3300 (1996).
21. A. I. Smolyakov, V. Godyak, and Y. A. Tyshetskiy, Phys. Plasmas 8, 3857 (2001).
22. C. K. Birdsall and A. B. Langdon, Plasma Physics Via Computer Simulation (IOP Publishing, Bristol and Philadelphia, 1991).
23. A. B. Langdon and J. M. Dawson, Proceedings of the First Conference on Numerical Simulation of Plasmas (College of William and Mary, Williamsburg, VA, 1967), p. 39.
24. B. I. Cohen, M. A. Mostrom, D. R. Nicholson, A. N. Kaufman, C. E. Max, and A. B. Langdon, Phys. Fluids 18, 470 (1975).
25. M. Lampe and W. M. Manheimer, IEEE Trans. Plasma Sci. 26, 1592 (1998).
26. M. A. Lieberman and V. A. Godyak, IEEE Trans. Plasma Sci. 26, 955 (1998).
27. V. A. Godyak, B. M. Alexandrovich, and V. I. Kolobov, Phys. Rev. E 64, 026406 (2001).
28. A. Smolyakov, V. Godyak, and A. Duffy, Phys. Plasmas 7, 4755 (2000).
29. F. F. Chen, Phys. Plasmas 8, 3008 (2001).
30. I. D. Kaganovich, Phys. Rev. Lett. 82, 327 (1999).
31. J. D. Evans and F. F. Chen, Phys. Rev. Lett. 86, 5502 (2001).
32. V. I. Perel and Y. M. Pinskii, Sov. Phys. JETP 27, 1014 (1968).