Electron heating in inductively coupled discharges

Physics of Plasmas

Volumn 3, Issue 9, 1996, Pages 3300-3303

  Shaing, K C ^a  

^a UNIVERSITY OF TEXAS AT AUSTIN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001233861     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.871598     Document Type: Article

References (4)

1. M. A. Lieberman and A. I. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley, New York, 1994), Chap, 12, p. 387.
2. G. E. H. Reuter and E. H. Sondheimer, Proc. R. Soc. London Ser, A 195, 336 (1948).
3. M. M. Turner, Phys. Rev. Lett. 71, 1844 (1993).
4. E. S. Weibel, Phys. Fluids 10, 741 (1967).