Harmonic content and time variation of electron energy distributions in high-plasma-density, low-pressure inductively coupled discharges

Journal of Applied Physics

Volumn 94, Issue 4, 2003, Pages 2223-2233

  Vasenkov, Alex V ^a,b   Kushner, Mark J ^a  

^a University of Illinois at Urbana Champaign   (United States)

^b KUTATELADZE INSTITUTE OF THERMOPHYSICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC FIELDS; FREQUENCIES; INDUCTIVELY COUPLED PLASMA; MONTE CARLO METHODS; PLASMA DENSITY; SECOND HARMONIC GENERATION;

ELECTRON ENERGY DISTRIBUTIONS (EED);

ELECTRON ENERGY LEVELS;

EID: 0041923686     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1592630     Document Type: Article

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