Self-assembly of surface-micromachined structures using electrostatic attraction

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4561, Issue , 2001, Pages 66-76

  Johnstone, Robert W ^a   Parameswaran, M ^a  

^a SIMON FRASER UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POTENTIAL; ELECTROSTATICS; MICROMACHINING; MIRRORS; SELF ASSEMBLY; THIN FILMS;

MICRO-FABRICATED HINGES;

MICROELECTROMECHANICAL DEVICES;

EID: 0035763901     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.443076     Document Type: Conference Paper

References (5)

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3. L.Y. Lin, S.S. Lee, M.C. Wu, and K.S.J. Pister. "Micromachined Integrated optics for Free-Space Interconnections," IEEE Micro Electro Mechanical Systems Workshop. Amsterdam, Netherlands, pp 77-82 (1995).
4. K.F. Harsh, V.M. Bright, and Y.C Lee. "Study of Micro-Scale Limits of Solder Self-Assembly for MEMS," Proceedings of the 50th Electronic Components and Technology Conference. May 21-24, 2000, Las Vegas, Nevada (2000).
5. David J. Grifitths. Introduction to Electrodynamics. Prentice Hall, New Jersey, 1989.