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Surface and Coatings Technology

Volumn 188-189, Issue 1-3 SPEC.ISS., 2004, Pages 409-414

Effects of deposition temperature and bilayer thickness on the mechanical properties of AlN/TiN multilayer thin films

(3) Vasco Boutos, T a Sanjines R a Karimi, Ayat a

a EPFL (Switzerland)

Author keywords

AlN TiN multilayers; Bilayer thickness; Hardness enhancement; Magnetron sputtering; Microstructures

Indexed keywords

ALUMINUM NITRIDE; EPITAXIAL GROWTH; GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; MULTILAYERS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

BIAXIAL RESIDUAL STRESSES; BILAYER THICKNESS; CROSS-SECTIONAL ELECTRON MICROSCOPY; STRUCTURAL MODIFICATIONS;

THIN FILMS;

FILM; FILM THICKNESS;

EID: 14644397275 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2004.08.039 Document Type: Article

Times cited : (29)

References (18)

1
- 0033076264
- B.M. Clemens H. Kung S.A. Barnett MRS Bull. 24 2 1999 20
- (1999) MRS Bull. , vol.24 , Issue.2 , pp. 20
- Clemens, B.M.¹ Kung, H.² Barnett, S.A.³

2
- 0033078120
- H. Geisler K.O. Schweitz J. Chevallier J. Bottinger K. Samwer Phila. Mag., A 79 2 1999 485-500
- (1999) Phila. Mag., A , vol.79 , Issue.2 , pp. 485-500
- Geisler, H.¹ Schweitz, K.O.² Chevallier, J.³ Bottinger, J.⁴ Samwer, K.⁵

3
- 0033311996
- V.P. Godbole K. Dovidenko A.K. Sharma J. Narayan Mater. Sci. Eng., B, Solid-State Mater. Adv. Technol. 68 1999 85-90
- (1999) Mater. Sci. Eng., B, Solid-State Mater. Adv. Technol. , vol.68 , pp. 85-90
- Godbole, V.P.¹ Dovidenko, K.² Sharma, A.K.³ Narayan, J.⁴

4
- 0036535005
- D.G. Kim T.Y. Seong Y.J. Baik Surf. Coat. Technol. 153 2002 79-83
- (2002) Surf. Coat. Technol. , vol.153 , pp. 79-83
- Kim, D.G.¹ Seong, T.Y.² Baik, Y.J.³

5
- 0032357941
- Y.Y. Wang M.S. Wong W.J. Chia J. Rechner W.D. Sproul J. Vac. Sci. Technol., A 16 1998 3341
- (1998) J. Vac. Sci. Technol., A , vol.16 , pp. 3341
- Wang, Y.Y.¹ Wong, M.S.² Chia, W.J.³ Rechner, J.⁴ Sproul, W.D.⁵

6
- 0038277098
- M.A. Auger O. Sanchez C. Ballestersos M. Jergel M. Aguilar-Frutis C. Falcony Thin Solid Films 433 2003 211-216
- (2003) Thin Solid Films , vol.433 , pp. 211-216
- Auger, M.A.¹ Sanchez, O.² Ballestersos, C.³ Jergel, M.⁴ Aguilar-Frutis, M.⁵ Falcony, C.⁶

7
- 6244305376
- A. Madan I.W. Kim S.C. Cheng P. Yashar V.P. Dravid S.A. Barnett Phys. Rev. Lett. 78 9 1997 1743-1746
- (1997) Phys. Rev. Lett. , vol.78 , Issue.9 , pp. 1743-1746
- Madan, A.¹ Kim, I.W.² Cheng, S.C.³ Yashar, P.⁴ Dravid, V.P.⁵ Barnett, S.A.⁶

8
- 0036494090
- V. Pankov M. Evstigneev R.H. Prince J. Vac. Sci. Technol., A 20 2002 430
- (2002) J. Vac. Sci. Technol., A , vol.20 , pp. 430
- Pankov, V.¹ Evstigneev, M.² Prince, R.H.³

9
- 0032051026
- C.J. Tavares L. Rebouta B. Almeida J. Besssa e Sousa M.F. de Silva J.C. Soares Thin Solid Films 317 1998 124
- (1998) Thin Solid Films , vol.317 , pp. 124
- Tavares, C.J.¹ Rebouta, L.² Almeida, B.³ Besssa e Sousa, J.⁴ de Silva, M.F.⁵ Soares, J.C.⁶

10
- 0030383011
- M. Setoyama A. Nakamaya M. Tanaka N. Kitagawa T. Nomura Surf. Coat. Technol. 86-87 1996 225
- (1996) Surf. Coat. Technol. , vol.86-87 , pp. 225
- Setoyama, M.¹ Nakamaya, A.² Tanaka, M.³ Kitagawa, N.⁴ Nomura, T.⁵

11
- 0033886954
- A. Thobor C. Rousselot C. Clemenct J. Takadoum N. Martin R. Sanjines F. Levy Surf. Coat. Technol. 124 2000 210
- (2000) Surf. Coat. Technol. , vol.124 , pp. 210
- Thobor, A.¹ Rousselot, C.² Clemenct, C.³ Takadoum, J.⁴ Martin, N.⁵ Sanjines, R.⁶ Levy, F.⁷

12
- 18744411778
- V. Pankov M. Evstigneev R.H. Prince J. Appl. Phys. 2 8 2002 4255-4260
- (2002) J. Appl. Phys. , vol.2 , Issue.8 , pp. 4255-4260
- Pankov, V.¹ Evstigneev, M.² Prince, R.H.³

13
- 0037631455
- O. Ersen M.H. Tuilier O. Thomas P. Gergaud P. Lagarde Appl. Phys. Lett. 82 21 2003 3659-3661
- (2003) Appl. Phys. Lett. , vol.82 , Issue.21 , pp. 3659-3661
- Ersen, O.¹ Tuilier, M.H.² Thomas, O.³ Gergaud, P.⁴ Lagarde, P.⁵

14
- 0021464129
- J.C. Schuster J. Bauer J. Solid State Chem. 53 1984 260
- (1984) J. Solid State Chem. , vol.53 , pp. 260
- Schuster, J.C.¹ Bauer, J.²

15
- 14644426897
- A.K. Bhattacharya W.D. Nix Int. J. Solids Struct. 24 12 1988 129
- (1988) Int. J. Solids Struct. , vol.24 , Issue.12 , pp. 129
- Bhattacharya, A.K.¹ Nix, W.D.²

16
- 0035342195
- J.R. Tuck A.M. Korsunsky D.G. Bhat S.J. Bull Surf. Coat. Technol. 139 2001 63
- (2001) Surf. Coat. Technol. , vol.139 , pp. 63
- Tuck, J.R.¹ Korsunsky, A.M.² Bhat, D.G.³ Bull, S.J.⁴

17
- 0033325615
- Ph.C. Yashar W.D. Sproul Vacuum 55 1999 179-190
- (1999) Vacuum , vol.55 , pp. 179-190
- Yashar, Ph.C.¹ Sproul, W.D.²

18
- 0001267864
- D.R. Mckenzie Y. Tin W.D. Mcfall N.H. Hoang J. Phys., Condens. Matter 8 1996 5883
- (1996) J. Phys., Condens. Matter , vol.8 , pp. 5883
- Mckenzie, D.R.¹ Tin, Y.² Mcfall, W.D.³ Hoang, N.H.⁴

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