TiN/AlN bilayers and multilayers grown by magnetron co-sputtering

Thin Solid Films

Volumn 433, Issue 1-2 SPEC., 2003, Pages 211-216

  Auger, M A ^a   Sanchez, O ^a   Ballesteros, C ^b   Jergel, M ^c,d   Aguilar Frutis, M ^e   Falcony, C ^c  

^a INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

^b UNIVERSIDAD CARLOS III DE MADRID   (Spain)

^c DEPARTAMENTO DE FÍSICA   (Mexico)

^d INSTITUTE OF PHYSICS   (Slovakia)

^e INSTITUTO POLITÉCNICO NACIONAL   (Mexico)

Author keywords

Aluminium nitride; Multilayers; Reactive sputtering; Titanium nitride

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELLIPSOMETRY; HARDNESS; MAGNETRON SPUTTERING; SUBSTRATES; TITANIUM NITRIDE; TRANSMISSION ELECTRON MICROSCOPY; WEAR RESISTANCE; X RAY DIFFRACTION ANALYSIS;

NANOINDENTER MEASUREMENTS;

MULTILAYERS;

EID: 0038277098     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00321-3     Document Type: Conference Paper

References (17)

1. Holleck H. J. Vac. Sci. Technol. A. 4:1986;2661.
2. Auger M.A., Gago R., Fernández M., Sánchez O., Albella J.M. Surf. Sci. Technol. 157:2002;26.
3. Wittling M., Bendavid A., Martin P.J., Swain M.V. Thin Solid Films. 270:1995;283.
4. Oliver W.C., Pharr G.M. J. Mater. Res. 7:1992;1564.
5. Akiyama M., Xu C.N., Hagio T., Nonaka K. J. Ceram. Soc. Jpn. 110:2002;115.
6. Engelmark F., Iriarte G.F., Katardijev I.V., Ottosson M., Muralt P., Berg S. J. Vac. Sci. Techn. A. 19:2001;2664.
7. Greene J.E., Sundgren J.-E., Hultman L., Petrov I., Bergstrom D.B. Appl. Phys. Lett. 67:1995;2928.
8. Hultman L., Sundgren J.-E., Greene J.E., Bergstrom D.B., Petrov I. J. Appl. Phys. 78:1995;5395.
9. Williamson G.K., Hall W.H. Acta Metall. 1:1953;22.
10. Yashar P.C., Sproul W.D. Vacuum. 55:1999;179.
11. Chu X., Barnett S.A. J. Appl. Phys. 77:1995;4403.
12. Anderson P.M., Li C. Nanostruct. Mater. 5:1995;349.
13. Kato M., Mori T., Schwartz L.H. Acta Metall. 28:1980;285.
14. Mirkarimi P.B., Hultman L., Barnett S.A. Appl. Phys. Lett. 57:1990;2654.
15. Cammaratta R.C., Schlesinger T.E., Kim C., Qadri S.B., Edelstein A.S. Appl. Phys. Lett. 57:1990;2654.
16. Cammarata R.C., Schlesinger T.E., Kim C., Qadri S.B., Edelstein A.S. Appl. Phys. Lett. 56:1990;1862.
17. Kim J.O., Aschenbach J.D., Shinn M., Barnett S.A. J. Mater. Res. 7:1992;2248.