SCOPUS 정보 검색 플랫폼

Volumn 82, Issue 21, 2003, Pages 3659-3661

Cubic local order around Al and intermixing in short-period AlN/TiN multilayers studied by Al K-edge extended x-ray absorption fine structure spectroscopy and x-ray diffraction

(5) Ersen, O a Tuilier, M H a Thomas, O b Gergaud, P b Lagarde, P c

a UNIVERSITÉ DE HAUTE ALSACE (France)

b CNRS (France)

c SYNCHROTRON SOLEIL (France)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE; COMPRESSIVE STRESS; ELASTIC MODULI; LATTICE CONSTANTS; MAGNETRON SPUTTERING; MULTILAYERS; PHASE TRANSITIONS; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

X-RAY ABSORPTION FINE STRUCTURE (EXAFS);

TITANIUM NITRIDE;

EID: 0037631455 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.1578692 Document Type: Article

Times cited : (16)

References (14)

1
- 0001752813
- M. Ueno, A. Onodera, O. Shimomura, and K. Takemura, Phys. Rev. B 45, 10123 (1992).
- (1992) Phys. Rev. B , vol.45 , pp. 10123
- Ueno, M.¹ Onodera, A.² Shimomura, O.³ Takemura, K.⁴

2
- 33751130770
- N. E. Christensen and I. Gorczyga, Phys. Rev. B 47, 4307 (1993).
- (1993) Phys. Rev. B , vol.47 , pp. 4307
- Christensen, N.E.¹ Gorczyga, I.²

3
- 6244305376
- A. Madan, I. W. Kim, S. C. Cheng, P. Yashar, V. P. Dravid, and S. A. Barnett, Phys. Rev. Lett. 78, 1743 (1997).
- (1997) Phys. Rev. Lett. , vol.78 , pp. 1743
- Madan, A.¹ Kim, I.W.² Cheng, S.C.³ Yashar, P.⁴ Dravid, V.P.⁵ Barnett, S.A.⁶

4
- 79956060332
- V. Pankov, M. Evstigneev, and R. H. Prince, Appl. Phys. Lett. 80, 4142 (2002).
- (2002) Appl. Phys. Lett. , vol.80 , pp. 4142
- Pankov, V.¹ Evstigneev, M.² Prince, R.H.³

5
- 0033886954
- A. Thobor, C. Rousselot, C. Clement, J. Takadoum, N. Martin, R. Sanjines, and F. Levy, Surf. Coat. Technol. 124, 210 (2000).
- (2000) Surf. Coat. Technol. , vol.124 , pp. 210
- Thobor, A.¹ Rousselot, C.² Clement, C.³ Takadoum, J.⁴ Martin, N.⁵ Sanjines, R.⁶ Levy, F.⁷

6
- 0032051026
- C. J. Tavares, L. Rebouta, B. Almeida, J. Bessa e Sousa, M. F. da Silva, and J. C. Soares, Thin Solid Films 317, 124 (1998).
- (1998) Thin Solid Films , vol.317 , pp. 124
- Tavares, C.J.¹ Rebouta, L.² Almeida, B.³ Bessa e Sousa, J.⁴ Da Silva, M.F.⁵ Soares, J.C.⁶

7
- 0030383011
- M. Setoyama, A. Nakamaya, M. Tanaka, N. Kitagawa, and T. Nomura, Surf. Coat. Technol. 86-87, 225 (1996).
- (1996) Surf. Coat. Technol. , vol.86-87 , pp. 225
- Setoyama, M.¹ Nakamaya, A.² Tanaka, M.³ Kitagawa, N.⁴ Nomura, T.⁵

8
- 0036494090
- V. Pankov, M. Evstigneev, and R. H. Prince, J. Vac. Sci. Technol. A 20, 430 (2002).
- (2002) J. Vac. Sci. Technol. A , vol.20 , pp. 430
- Pankov, V.¹ Evstigneev, M.² Prince, R.H.³

9
- 0003631606
- Springer, Stuttgart
- I. Noyan and J. Cohen, Residual Stress (Springer, Stuttgart, 1987).
- (1987) Residual Stress
- Noyan, I.¹ Cohen, J.²

10
- 0024142779
- D. S. Rickerby, A. M. Jones, and B. A. Bellamy, Surf. Coat. Technol. 36, 661 (1988).
- (1988) Surf. Coat. Technol. , vol.36 , pp. 661
- Rickerby, D.S.¹ Jones, A.M.² Bellamy, B.A.³

11
- 0000508016
- M. Katsikini, E. C. Paloura, T. S. Cheng, and C. T. Foxon, J. Appl. Phys. 82, 1166 (1997).
- (1997) J. Appl. Phys. , vol.82 , pp. 1166
- Katsikini, M.¹ Paloura, E.C.² Cheng, T.S.³ Foxon, C.T.⁴

12
- 0013694678
- S. I. Zabinsky, J. J. Rehr, A. Ankudinov, R. C. Albers, and M. J. Eller, Phys. Rev. B 52, 2995 (1995).
- (1995) Phys. Rev. B , vol.52 , pp. 2995
- Zabinsky, S.I.¹ Rehr, J.J.² Ankudinov, A.³ Albers, R.C.⁴ Eller, M.J.⁵

13
- 54749090787
- M. Newville, B. Ravel, D. Haskel, J. J. Rehr, E. A. Stern, and Y. Yacoby, Physica B 208-209, 154 (1995).
- (1995) Physica B , vol.208-209 , pp. 154
- Newville, M.¹ Ravel, B.² Haskel, D.³ Rehr, J.J.⁴ Stern, E.A.⁵ Yacoby, Y.⁶

14
- 0021464129
- J. C. Schuster and J. Bauer, J. Solid State Chem. 53, 260 (1984).
- (1984) J. Solid State Chem. , vol.53 , pp. 260
- Schuster, J.C.¹ Bauer, J.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.