Enhancement of mechanical properties of TiN/AlN multilayers by modifying the number and the quality of interfaces

Surface and Coatings Technology

Volumn 124, Issue 2-3, 2000, Pages 210-221

  Thobor, Anne ^a   Rousselot, Christophe ^a   Clement, Christine ^a   Takadoum, Jamal ^a   Martin, Nicolas ^b   Sanjines, Rosendo ^b   Levy, Francis ^b  

^a UNIVERSITÉ DE FRANCHE COMTÉ   (France)

^b EPFL   (Switzerland)

Author keywords

Interfacial roughness; Ion bombardment; Mechanical properties; Reactive sputtering; TiN AlN multilayers

Indexed keywords

ALUMINUM COMPOUNDS; ATOMIC FORCE MICROSCOPY; ETCHING; HARDNESS; INTERFACES (MATERIALS); ION BOMBARDMENT; MORPHOLOGY; MULTILAYERS; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS; TITANIUM NITRIDE; WEAR RESISTANCE;

ALUMINUM NITRIDE; GLOW DISCHARGE OPTICAL EMISSION SPECTROSCOPY (GDOES); POST LAYER DEPOSITION ION BOMBARDMENT (PLDIB) PROCESS;

PROTECTIVE COATINGS;

EID: 0033886954     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00655-6     Document Type: Article

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