Construction of probe-based data storage with ultra-high areal density

Proceedings of the IEEE Conference on Nanotechnology

Volumn 2001-January, Issue , 2001, Pages 207-212

  Shin, Hyunjung ^a   Jeon, Jong Up ^b   Hong, Seungbum ^a   Choi, Jae Joon ^c   Jeong, Hee Moon ^a   Min, Dong Ki ^a   Kim, Yong Il ^a   Lee, Chang Soo ^a   Lee, Sukhan ^a  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^b University of Ulsan   (South Korea)

^c iCurie Lab   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; APPLICATION SPECIFIC INTEGRATED CIRCUITS; ASPECT RATIO; DATA STORAGE EQUIPMENT; DIGITAL STORAGE; ELECTROSTATIC ACTUATORS; FERROELECTRIC MATERIALS; FERROELECTRICITY; LEAD; NANOTECHNOLOGY; NATURAL FREQUENCIES; SIGNAL PROCESSING;

CANDIDATE MATERIALS; ELECTRIC POLARIZATION; HIGH-ASPECT-RATIO TIPS; MOLDING TECHNIQUES; MULTI PROBE ARRAY; RESONANCE FREQUENCIES; SIGNAL PROCESSING CIRCUITS; TEMPERATURE RANGE;

PROBES;

EID: 14544307406     PISSN: 19449399     EISSN: 19449380     Source Type: Conference Proceeding    
DOI: 10.1109/NANO.2001.966420     Document Type: Conference Paper

References (23)

1. H. J. Mamin, B. D. Terris, L. S. Fan, S. Hoen, R. C. Barrett, and D. Rugar, "High-density Data Storage using Proximal Probe techniques", IBM J. Res. Develop. 39(6), 681-700 (1995)
2. H. Shin, J.-H. Lee, K. Lee, W. K. Moon, J. U. Jeon, G. Lim, Y. Pak, J. H. Park, and K. H. Yoon: An Application of Polarized Domains in Ferroelectric Thin Films using Scanning Probe Microscope, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 47 [4], 801-807 (2000)
3. M. Despont, J. Brugger, U. Drescher, U. Durig, W. Haberle, M. Lutwyche, H. Roithuisen, R. Widmer, H. Rohrer, G. K. Binnig, and P. Vettiger, in IEEE Int. Micro Electro Mechanical Systems Tech. Dig., 564 (1999)
4. K. M. Lee, H. J. Shin, W. K. Moon, J. U. Jeon, and Y. Eugene Pak, "Detection mechanism of spontaneous polarization in ferroelectric thin films using electrostatic force microscopy", Jpn. J. Appl. Phvs., vol. 38, pp. 264-266, 1999.
5. 3 (PZT) thin films using atomic force microscopy", in SPIE Proc. Smart Structures and Materials, vol. 3675, pp. 94-103, 1999.
6. T. Itoh and T. Suga, "Scanning Force Microscope using a piezoelectric microcantilever", J. Vac. Sci. Tech., B12(3), 1581-85 (1994)
7. T. Itoh and T. Suga, "Development of a Force Sensor for Atomic Force Microscopy using Piezoelectric Thin Films", Nanotechnology, 4, 218-224 (1993)
8. M. Tortonese, R. C. Barrett, and C. F. Quate, "Atomic Resolution with an Atomic Force Microscope using Piezoresistive Detection", Appl. Phys. Lett., 62, 834 (1993)
9. Toru Fujii, Shunji Watanabe, Masatoshi Suzuki, and Takamitsu Fujiu, "Application of lead zirconate titanate thin film displacement sensors for the atomic force microscope", J. Vac. Sci. Tech., B13, 1119 (1995)
10. R. Linnemann, T. Gotszalk, I. W. Rangelow, P. Dumania, and E. Oesterschulze, "Atomic Force Microscopy and Lateral Force Microscopy using Piezoresistive Cantilever", J. Vac. Sci. Tech., B14(2), 856-860 (1996)
11. N. Blanc, J. Brugger, N. F. de Rooji, and U. Durig, "Scanning force microscopy in the dynamic mode using microfabricated capacitive sensors", J. Vac. Sci. Tech., B14, 901 (1996)
12. 3 Microcantilever for Dynamic Scanning Force Microscopy", Appl. Phys. Lett., 69(14), 2036-38 (1996)
13. S. C. Minne, S. R. Manalis, A. Atalar, and C. F. Quate, "Contact Imaging in the Atomic Force Microscope using a Higher Order Flexural Mode Combined with a New Sensor", Appl Phys. Lett., 68(10), 1427-29 (1996)
14. J. Chu, T. Itoh, C. Lee, T. Suga, and K. Watanabe, "Frequency Modulation Detection High Vacuum Scanning Force Microscope with a Self-Oscillating Piezoelectric Cantilever", J. Vac. Sci. Tech., B14, 901 (1996)
15. E. Grochowski and R. F. Hoyt, "Future Trends in Hard Disk Dirves", IEEE Trans. Magnetics, 32(3), 1850-54 (1996)
16. S. C. Minne, Ph. Flueckiger, H. T. Soh, and C. F. Quate, "Atomic Force Microscope Lithography using Amorphous Silicon as a Resist and Advances in Parallel Operation", J. Vac. Sci. Tech., B13(3), 1380 (1995)
17. M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Haeberle, H. Rohrer, H. Rothuizen, and P. Vettiger, "Microfabrication and Parallel Operation of 5×5 2D AFM Cantilever Arrays for Data Storage and Imaging", Proceedings IEEE International Workshop on Microelectro Mechanical Systems (MEMS 98), Heidelberg, Germany, Jan. 25-29 (1998)
18. B. W. Chui, T. D. Stowe, T. W. Kenny, H. J. Mamin, B. D. Terris, and D. Rugar, "Low-stiffness Silicon Cantilever for Thermal Writing and Piezoresistive Readback with the Atomic Force Microscope", Appl Phys. Lett., 69(18), 2767-69 (1996)
19. R. P. Ried, H. J. Mamin, B. D. Terris, L. S. Fan, and D. Rugar, J. Microelectromech. Syst., 6, 294 (1997)
20. T. Itoh, C. Lee, J. Chu, and T. Suga, to be published (1997)
21. J. J. Choi, H. Park, K. Y. Kim, and J. J. Up, "Electromagnetic Micro x-y Stage for Prob-based Data Storage", J. Semiconductor Tech. & Sci., 1 [1], 84-93 (2001)
22. H. Shin, J. Woo, S. Hong, J. U. Jeon, Y. Pak, and K. No,: Formation of Ferroelectric Nano-Domains using Scanning Force Microscopy for the Future Application of Memory Devices Integrated Ferroelectrics, 31, 163-171, (2000)
23. K. No, H. W. Song, J. Hong, J. Woo, H. Shin, and S. Hong, accepted for the publication in Ferroelectrics (2001)