High-voltage SPM oxidation of ZrN: Materials for multiscale applications

Nanotechnology

Volumn 16, Issue 2, 2005, Pages 262-266

  Farkas, N ^a   Comer, J R ^a   Zhang, G ^b   Evans, E A ^b   Ramsier, R D ^a,b   Dagata, J A ^c  

^a UNIVERSITY OF AKRON   (United States)

^b University of Akron   (United States)

^c NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DELAMINATION; ETCHING; MICROSCOPIC EXAMINATION; OXIDATION; PLASTIC FLOW; THERMODYNAMIC STABILITY; THIN FILMS;

CROSS-SECTIONS; HIGH-VOLTAGE OXIDE GROWTH; LOCAL OXIDATION; SILICON CANTILEVERS;

ZIRCONIUM COMPOUNDS;

EID: 14044262161     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/16/2/014     Document Type: Article

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