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Vacuum

Volumn 77, Issue 3, 2005, Pages 329-335

Dielectric properties of sol-gel derived Ta2O5 thin films

(5) Yildirim, S a Ulutas, K a Deger, D a Zayim, E O b Turhan, I b

a ISTANBUL UNIVERSITY (Turkey)

b ISTANBUL TECHNICAL UNIVERSITY (Turkey)

Author keywords

Dielectric constant; Dielectric loss and relaxation; Sol gel; Ta2O5; Thin films

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIELECTRIC PROPERTIES; ELECTRODES; OPTICAL PROPERTIES; PERMITTIVITY; RANDOM ACCESS STORAGE; SOL-GELS; SPUTTERING; THIN FILMS;

ANTIREFLECTION LAYERS; DIELECTRIC LOSS AND RELAXATION; STORAGE CAPACITORS; TA2O5;

TANTALUM COMPOUNDS;

EID: 13444279987 PISSN: 0042207X EISSN: None Source Type: Journal
DOI: 10.1016/j.vacuum.2004.12.002 Document Type: Article

Times cited : (32)

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