Thin tantalum and tantalum oxide films grown by pulsed laser deposition

Applied Surface Science

Volumn 168, Issue 1-4, 2000, Pages 234-238

  Zhang, Jun Ying ^a   Boyd, Ian W ^a  

^a UNIVERSITY COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELLIPSOMETRY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; NEODYMIUM LASERS; PERMITTIVITY; PULSED LASER APPLICATIONS; REFRACTIVE INDEX; TANTALUM; TANTALUM COMPOUNDS; ULTRAVIOLET SPECTROPHOTOMETERS; X RAY PHOTOELECTRON SPECTROSCOPY;

OXYGEN PRESSURE; PULSED LASER DEPOSITION; TANTALUM OXIDE;

FILM GROWTH;

EID: 0034506485     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(00)00605-X     Document Type: Article

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