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Volumn 15, Issue 12, 2004, Pages 1831-1836

Nanocrystal formation in annealed a-SiO0.17N0.07:H films

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; COALESCENCE; HYDROGENATION; NANOSTRUCTURED MATERIALS; SILICON COMPOUNDS; X RAY DIFFRACTION ANALYSIS;

EID: 11144348001     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/15/12/024     Document Type: Review
Times cited : (29)

References (34)
  • 15
    • 11144331872 scopus 로고    scopus 로고
    • Chemical vapor deposition method for amorphous silicon and resulting film European Patent Specification 1164206
    • Theil J A, Kooi G J and Varghese R P 2001 Chemical vapor deposition method for amorphous silicon and resulting film European Patent Specification 1164206
    • (2001)
    • Theil, J.A.1    Kooi, G.J.2    Varghese, R.P.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.