Study of SiOx decomposition kinetics and formation of Si nanocrystals in an SiO2 matrix

Journal of Non-Crystalline Solids

Volumn 227-230, Issue PART 1, 1998, Pages 507-512

  Hinds, B J ^a   Wang, F ^a   Wolfe, D M ^a   Hinkle, C L ^a   Lucovsky, G ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

Decomposition; Deposition; Photoluminescence; SiOx

Indexed keywords

AMORPHOUS ALLOYS; ANNEALING; CHEMICAL VAPOR DEPOSITION; DECOMPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; NANOSTRUCTURED MATERIALS; PHOTOLUMINESCENCE; REACTION KINETICS;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

SILICA;

EID: 0032068312     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(98)00094-5     Document Type: Article

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