Theoretical analysis of oxygen-excess defects in SiO2 thin film by molecular orbital method

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 35, Issue 2 SUPPL. B, 1996, Pages 1445-1449

  Kanashima, Takeshi ^a   Okuyama, Masanori ^a   Hamakawa, Yoshihiro ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

2.4 eV; Ab initio; Molecular orbital calculation; Oxygen excess defect; Photo CVD; Photoluminescence; SiO2

Indexed keywords

ANNEALING; CALCULATIONS; CHEMICAL VAPOR DEPOSITION; CRYSTAL DEFECTS; ELECTRON ENERGY LEVELS; ELECTRON TRANSITIONS; MATHEMATICAL MODELS; OPTICAL VARIABLES MEASUREMENT; OXYGEN; PHOTOLUMINESCENCE; SILICA; THERMAL EFFECTS;

AB INITIO METHOD; MOLECULAR ORBITAL METHOD; OXYGEN EXCESS DEFECTS; PHOTOLUMINESCENCE MEASUREMENT; SEMI EMPIRICAL METHOD;

THIN FILMS;

EID: 0030079698     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.1445     Document Type: Article

References (16)

1. M. Kohketsu, K. Awazu, H. Kawazoe and M. Yamane: Jpn. J. Appl. Phys. 28 (1989) 622.
2. R. Tohmon, Y. Shimogaichi, H. Mizuno and Y. Ohki: Phys. Rev. Lett. 62 (1989) 1388.
3. M. Kohketsu, K. Awazu, H. Kawazoe and M. Yamane: Jpn. J. Appl. Phys. 28 (1989) 615.
4. Y. Hibino and H. Hanafusa: J. Appl. Phys. 60 (1986) 1797.
5. O'Keefle and G. V. Gibbs: J. Chem. Phys. 81 (1984) 876.
6. R. Tohmon, Y. Shimogaichi, H. Mizuno, Y. Ohki, K. Nagasawa and Y. Hama: Phys. Rev. Lett. 62 (1989) 1388.
7. R. Tohmon, H. Mizuno, Y. Ohki, K. Sasagane, K. Nagasawa and Y. Hama: Phys. Rev. B 39 (1989) 1337.
8. T. Kanashima, R. Nagayoshi, M. Okuyama and Y. Hamakawa: J. Appl. Phys. 74 (1993) 5742.
9. T. Kanashima, M. Okuyama and Y. Hamakawa: Jpn. J. Appl. Phys. 32 (1993) 3113.
10. T. Kanashima, M. Okuyama and Y. Hamakawa: Appl. Surf. Sci. 79/80 (1994) 321.
11. H. Nishikawa, R. Nakamura, R. Tohmon, Y. Ohki, Y. Sakurai, K. Nagasawa and Y. Hama: Phys. Rev. B 41 (1990) 7828.
12. H. Imai, K. Arai, J. Isoya, H. Hosono, Y. Abe and H. Imagawa: Phys. Rev. B 48 (1993) 3116.
13. made by J. J. P. Stewart, Fujitsu Limited, Tokyo, Japan (1993)
14. Revision G.3, made by M. J. Frisch et al.: Gaussian, Inc., Pittsburgh PA, 1992.
15. 2, ed. R. A. B. Devine (Plenum Press, New York and London, 1988) p. 91
16. 2, ed. R. A. B. Devine (Plenum Press, New York and London, 1988) p. 125