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Thin Solid Films

Volumn 346, Issue 1, 1999, Pages 275-279

Effect of nitrogen doping on the structure of cluster or microcrystalline silicon embedded in thin SiO2 films

(2) Ehara, Takashi a Machida, Soushi a

a ISHINOMAKI SENSHU UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CHEMICAL BONDS; CRYSTAL MICROSTRUCTURE; DOPING (ADDITIVES); INFRARED SPECTROSCOPY; NANOSTRUCTURED MATERIALS; NITROGEN; RAMAN SPECTROSCOPY; SILICON; SPUTTERING; THIN FILMS;

RADIO-FREQUENCY COSPUTTERING;

SILICA;

EID: 0033149561 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(98)01501-6 Document Type: Article

Times cited : (19)

References (16)

1
- 0027540431
- S. Hayashi, M. Kataoka, K. Yamamoto, Jpn. J. Appl. Phys. 32 (1993) L274.
- (1993) Jpn. J. Appl. Phys. , vol.32
- Hayashi, S.¹ Kataoka, M.² Yamamoto, K.³

2
- 0001675228
- Z. Iqubal, S. Veprek, J. Phys. C: Solid State Phys. 15 (1982) 377.
- (1982) J. Phys. C: Solid State Phys. , vol.15 , pp. 377
- Iqubal, Z.¹ Veprek, S.²

3
- 0027541057
- T. Kawaguchi, S. Miyazima, Jpn. J. Appl. Phys. 32 (1993) L215.
- (1993) Jpn. J. Appl. Phys. , vol.32
- Kawaguchi, T.¹ Miyazima, S.²

4
- 0348225524
- H. Morisaki, F.W. Ping, H. Ono, K. Yazawa, J. Appl. Phys. 70 (1991) 1869.
- (1991) J. Appl. Phys. , vol.70 , pp. 1869
- Morisaki, H.¹ Ping, F.W.² Ono, H.³ Yazawa, K.⁴

5
- 0141775174
- L.T. Canham, Appl. Phys. Lett. 57 (1990) 1046.
- (1990) Appl. Phys. Lett. , vol.57 , pp. 1046
- Canham, L.T.¹

6
- 0000308874
- Y. Sasaki, C. Horie, Phys. Rev. 47 (1993) 3811.
- (1993) Phys. Rev. , vol.47 , pp. 3811
- Sasaki, Y.¹ Horie, C.²

7
- 0021376304
- T. Okada, T. Iwaki, K. Yamamoto, H. Kasahara, K. Abe, Solid State Commun. 49 (1984) L809.
- (1984) Solid State Commun. , vol.49
- Okada, T.¹ Iwaki, T.² Yamamoto, K.³ Kasahara, H.⁴ Abe, K.⁵

8
- 0344751778
- A. Matsuda, J. Non-cryst. Solids 59-60 (1983) 767.
- (1983) J. Non-cryst. Solids , vol.59-60 , pp. 767
- Matsuda, A.¹

9
- 0000671779
- U. Knoll, J. Meier, A. Shah, S. Mikhailov, J. Weber, J. Appl. Phys. 80 (1996) 4971.
- (1996) J. Appl. Phys. , vol.80 , pp. 4971
- Knoll, U.¹ Meier, J.² Shah, A.³ Mikhailov, S.⁴ Weber, J.⁵

10
- 0000311267
- S. Ghosh, A. De, S. Ray, A.K. Barua, J. Appl. Phys. 71 (1992) 5205.
- (1992) J. Appl. Phys. , vol.71 , pp. 5205
- Ghosh, S.¹ De, A.² Ray, S.³ Barua, A.K.⁴

11
- 0031275335
- T. Ehara, Thin Solid Films 310 (1997) 322.
- (1997) Thin Solid Films , vol.310 , pp. 322
- Ehara, T.¹

12
- 0026836129
- Y. Osaka, K. Tsunemoto, F. Toyomura, H. Myoren, K. Kohno, Jpn. J. Appl. Phys. 31 (1992) L365.
- (1992) Jpn. J. Appl. Phys. , vol.31
- Osaka, Y.¹ Tsunemoto, K.² Toyomura, F.³ Myoren, H.⁴ Kohno, K.⁵

13
- 0027667651
- S. Hayashi, T. Nagareda, Y. Kanzawa, K. Yamamoto, Jpn. J. Appl. Phys. 32 (1993) 3840.
- (1993) Jpn. J. Appl. Phys. , vol.32 , pp. 3840
- Hayashi, S.¹ Nagareda, T.² Kanzawa, Y.³ Yamamoto, K.⁴

14
- 0022733729
- I.H. Campbell, P.M. Fauchet, Solid State Commun. 58 (1986) 739.
- (1986) Solid State Commun. , vol.58 , pp. 739
- Campbell, I.H.¹ Fauchet, P.M.²

15
- 0021784345
- L.A. Nesbit, Appl. Phys. Lett. 46 (1985) 38.
- (1985) Appl. Phys. Lett. , vol.46 , pp. 38
- Nesbit, L.A.¹

16
- 0000635942
- F. Rochet, G. Dufour, H. Roulet, B. Pelloie, I. Perriere, E. Fogarassy, A. Slaoui, M. Froment, Phys. Rev. B 37 (1988) 6468.
- (1988) Phys. Rev. B , vol.37 , pp. 6468
- Rochet, F.¹ Dufour, G.² Roulet, H.³ Pelloie, B.⁴ Perriere, I.⁵ Fogarassy, E.⁶ Slaoui, A.⁷ Froment, M.⁸

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