Technology and realization of metallic curved waveguide mirrors in polymer film waveguides based on anisotropic plasma etching

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 19, Issue 1, 2001, Pages 87-89

  Fouckhardt, H ^a  

^a Rheinland Pfälzische Technische Universität Kaiserslautern Landau   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; MIRRORS; PLASMA ETCHING; PLASTIC FILMS; POLYMERS; TECHNOLOGY;

CURVED WAVEGUIDE MIRROR; POLYMER FILM WAVEGUIDE;

WAVEGUIDES;

EID: 0035109279     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1335839     Document Type: Article

References (2)

1. L. Eidada and L. W. Shacklette, IEEE J. Sci. Top. Quantum Electron. 32, 54 (2000).
2. T. A. Maniai, R. H. Heistand II, and P. Garrou, Surface Mount International Conference and Exposition Proceedings, San Jose, CA (1992), pp. 39-47 (unpublished).