A 600kHz electrically-coupled MEMS bandpass filter

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 702-705

  Pourkamali, Siavash ^a   Abdolvand, Reza ^a   Ayazi, Farrokh ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDPASS FILTERS; CAPACITORS; CRYSTAL RESONATORS; ELECTRIC NETWORK SYNTHESIS; ELECTRIC RESISTANCE; ELECTRODES; EQUIVALENT CIRCUITS; NATURAL FREQUENCIES; PASSIVE FILTERS; SEMICONDUCTING SILICON; SINGLE CRYSTALS;

ELECTRICAL CASCADING; MICROELECTROMECHANICAL FILTER; MICROMECHANICAL RESONATOR;

MICROELECTROMECHANICAL DEVICES;

EID: 0037817690     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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