Extreme ultraviolet mask fabrication with high inspection contrast TaSiN x absorber stack

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 6, 2003, Pages 3086-3090

  Wasson, J R ^a   Weisbrod, E J ^a   Lu, B ^a   Mangat, P J S ^a   Dauksher, W J ^a   Resnick, D J ^a   Sohn, J ^b   Engelstad, R ^b   Pettibone, D ^c  

^a MOTOROLA INC   (United States)

^b University of Wisconsin Madison   (United States)

^c KLA TENCOR CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRITICAL DIMENSIONS (CD); EXTREME ULTRAVIOLET LITHOGRAPHY (EUVL); IMAGE PLACEMENT (IP); OUT OF PLANE DISTORTION (OPD);

ANTIREFLECTION COATINGS; ELECTRON BEAMS; ETCHING; LIGHT ABSORPTION; PHOTOLITHOGRAPHY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; TANTALUM COMPOUNDS; THIN FILMS; ULTRAVIOLET RADIATION;

MASKS;

EID: 0942300017     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (17)

1. G. Zhang and P. Yan, Proc. SPIE 4889, 1092 (2002).
2. P. Yan, A. Ma, Y. Huang, B. Stoehr, and J. Valdivia, Proc. SPIE 4889, 431 (2002).
3. E. Fisch, L. Kindt, M. Lercel, K. Racette, and C. Williams, Proc. SPIE 4754, 865 (2002).
4. P. Mangat et al., J. Vac. Sci. Technol. B 17, 3029 (1999).
5. J. Wasson, B. Lu, P. Mangat, K. Nordquist, and D. Resnick, J. Vac. Sci. Technol. B 19, 2635 (2001).
6. K. H. Smith, J. R. Wasson, P. J. S. Mangat, W. J. Dauksher, and D. J. Resnick, J. Vac. Sci. Technol. B 19, 2906 (2001).
7. G. G. Stoney, Proc. R. Soc. London, Ser. A 82, 172 (1909).
8. W. J. Dauksher et al., J. Vac. Sci. Technol. B 13, 3103 (1995).
9. T. Liang, A. Stivers, R. Livengood, P. Yan, G. Zhang, and F. Lo, J. Vac. Sci. Technol. B 18, 3216 (2000).
10. D. Brinkley, R. White, R. Bozak, T. Liang, and G. Liu, Proc. SPIE 4754, 900 (2002).
11. B. LoBianco, R. White, and T. Nawrocki, Proc. SPIE 4889, 909 (2002).
12. V. Boegli et al., Proc. SPIE 4889, 283 (2002).
13. A. Wagner, R. Haight, and P. Longo, Proc. SPIE 4889, 457 (2002).
14. B. Lu, E. J. Weisbrod, P. J. S. Mangat, K. Nordquist, and E. Ainley, Proc. SPIE 5037, 952 (2003).
15. J. R. Wasson, D. Convey, P. J. S. Mangat, F. Bazzarre, and L. Parobek, Proc. SPIE 4562, 926 (2001).
16. E. G. Lovell, Mechanical Engineering Dept., University of Wisconsin, Madison, Wisconsin (private communication).
17. T. Liang, A. Stivers, P. Yan, E. Tejnil, and G. Zhang, Proc. SPIE 4562, 288 (2001).