MARS2: An advanced femtosecond laser mask repair tool

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4889, Issue 1, 2002, Pages 457-468

  Wagner, Alfred ^a   Haight, Richard ^a   Longo, Peter ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION; LASERS; LIGHT TRANSMISSION; PHASE SHIFT; THERMAL DIFFUSION;

FEMTOSECOND LASERS;

MASKS;

EID: 0038642151     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.467388     Document Type: Conference Paper

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