X-ray beam induced current/microprobe x-ray fluorescence: Synchrotron radiation based x-ray microprobe techniques for analysis of the recombination activity and chemical nature of metal impurities in silicon

Journal of Physics Condensed Matter

Volumn 16, Issue 2, 2004, Pages

  Vyvenko, O F ^a   Buonassisi, T ^b   Istratov, A A ^b   Weber, E R ^c  

^a ST PETERSBURG STATE UNIVERSITY   (Russian Federation)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c Lawrence Berkeley National Laboratory   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; CRYSTAL IMPURITIES; ELECTRIC CURRENTS; ELECTRON BEAMS; ENERGY DISPERSIVE SPECTROSCOPY; FLUORESCENCE; GRAIN BOUNDARIES; PRECIPITATION (CHEMICAL); SCANNING ELECTRON MICROSCOPY; SUPERSATURATION; SYNCHROTRON RADIATION; X RAYS;

ELECTRON BEAM INDUCED CURRENT (EBIC); X RAY FLUORESCENCE (XRF);

SEMICONDUCTING SILICON;

EID: 0442326585     PISSN: 09538984     EISSN: None     Source Type: Journal    
DOI: 10.1088/0953-8984/16/2/017     Document Type: Conference Paper

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