Structural and electrical properties of NiSi2 particles in silicon

Solid State Phenomena

Volumn 47-48, Issue , 1996, Pages 359-364

  Riedel, F ^a   Kronewitz, J ^a   Gnauert, U ^a   Seibt, M ^a   Schroter W ^a  

^a UNIVERSITY OF GÖTTINGEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; NICKEL COMPOUNDS; PLATELETS; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON; SILICON COMPOUNDS;

ADDITIONAL ANNEALING; DIFFUSION TEMPERATURE; ELECTRICAL AND STRUCTURAL PROPERTIES; MORPHOLOGICAL TRANSFORMATIONS; STRUCTURAL AND ELECTRICAL PROPERTIES;

DEEP LEVEL TRANSIENT SPECTROSCOPY;

EID: 17544366255     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Article

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