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Volumn 14, Issue 48, 2002, Pages 13079-13086
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Application of synchrotron-radiation-based x-ray microprobe techniques for the analysis of recombination activity of metals precipitated at Si/SiGe misfit dislocations
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Author keywords
[No Author keywords available]
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Indexed keywords
COPPER;
DISLOCATIONS (CRYSTALS);
HYDROGEN;
IMPURITIES;
IRON;
SEMICONDUCTING SILICON;
SEMICONDUCTING SILICON COMPOUNDS;
SYNCHROTRON RADIATION;
RECOMBINATION ACTIVITY;
SILICON GERMANIUM;
SPACE DISTRIBUTION;
X RAY BEAM INDUCED CURRENT TECHNIQUE;
X RAY FLUORESCENCE TECHNIQUE;
X RAY MICROPROBE TECHNIQUES;
X RAY ANALYSIS;
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EID: 0037122117
PISSN: 09538984
EISSN: None
Source Type: Journal
DOI: 10.1088/0953-8984/14/48/353 Document Type: Article |
Times cited : (22)
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References (14)
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