X-ray beam induced current - A synchrotron radiation based technique for the in situ analysis of recombination properties and chemical nature of metal clusters in silicon

Journal of Applied Physics

Volumn 91, Issue 6, 2002, Pages 3614-3617

  Vyvenko, O F ^a   Buonassisi, T ^a   Istratov, A A ^a   Hieslmair, H ^b   Thompson, A C ^b   Schindler, R ^c   Weber, E R ^d  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^c FRAUNHOFER INSTITUTE FOR SOLAR ENERGY SYSTEMS ISE   (Germany)

^d Lawrence Berkeley National Laboratory   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADVANCED LIGHT SOURCE; ANALYTICAL TECHNIQUES; CHEMICAL INFORMATION; CHEMICAL NATURE; CHEMICAL ORIGIN; HIGH SENSITIVITY; IN-SITU ANALYSIS; LAWRENCE BERKELEY NATIONAL LABORATORY; METAL CLUSTER; MICRO-PROBES; MICRON SCALE; MINORITY CARRIER; MULTI-CRYSTALLINE SILICON; RECOMBINATION ACTIVITY; SPATIAL RESOLUTION; X RAY BEAM; X RAY FLUORESCENCE;

DEFECTS; INDUCED CURRENTS; LIGHT SOURCES; POLYSILICON; SYNCHROTRON RADIATION; X RAYS;

CHEMICAL ANALYSIS;

EID: 0037087359     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1450026     Document Type: Article

References (15)

1. A. A. Istratov, H. Hieslmair, and E. R. Weber, Appl. Phys. A: Mater. Sci. Process. 70, 489 (2000).
2. A. A. Istratov and E. R. Weber, Appl. Phys. A: Mater. Sci. Process. 66, 123 (1998).
3. W. Schröter, J. Kronewitz, U. Gnauert, F. Riedel, and M. Seibt, Phys. Rev. B 52, 13726 (1995).
4. F. Riedel and W. Schroter, Phys. Rev. B 62, 7150 (2000).
5. A. A. Istratov, H. Hedemann, M. Seibt, O. F. Vyvenko, W. Schröter, T. Heiser, C. Flink, H. Hieslmair, and E. R. Weber, J. Electrochem. Soc. 145, 3889 (1998).
6. P. S. Plekhanov and T. Y. Tan, Appl. Phys. Lett. 76, 3777 (2000).
7. S. A. McHugo, J. Bailey, H. Hieslmair, and E. R. Weber, in Conference Record of the Twenty Fourth IEEE Photovoltaic Specialists Conference (IEEE, New York, 1994), Vol. 2, pp. 1607-10.
8. S. A. McHugo, J. Bailey, H. Hieslmair, and E. R. Weber, J. Electron. Mater. 25, 1417-21 (1994).
9. J. Bailey and E. R. Weber, Phys. Status Solidi A 137, 515 (1993).
10. J. Bailey, S. A. McHugo, H. Hieslmair, and E. R. Weber, J. Electron. Mater. 25, 1417 (1996).
11. M. Werner, E. R. Weber, S. McHugo, and K. L. Chapman, Solid State Phenom. 51, 81 (1996).
12. S. A. McHugo, A. C. Thompson, G. Lamble, C. Flink, and E. R. Weber, Physica B 273, 371 (1999).
13. S. A. McHugo, A. C. Thompson, C. Flink, E. R. Weber, G. Lamble, B. Gunion, A. MacDowell, R. Celestre, H. A. Padmore, and Z. Hussain, J. Electron Spectrosc. Relat. Phenom. 210, 395 (2000).
14. S. A. McHugo and C. Flink, Appl. Phys. Lett. 77, 3598 (2000).
15. S. A. McHugo, A. C. Thompson, I. Perichaud, and S. Martinuzzi, Appl. Phys. Lett. 72, 3482 (1998).