On the Evaluation of Performance Parameters of MOSFETs with Alternative Gate Dielectrics

IEEE Transactions on Electron Devices

Volumn 50, Issue 12, 2003, Pages 2564-2567

  Ahmed, Khaled Z ^a   Kraus, Philip A ^a   Olsen, Chris ^a   Nouri, Faran ^a  

^a APPLIED MATERIALS INC   (United States)

Author keywords

Drive current; High ; MOSFET; Oxynitrides; Transconductance; Ultrathin oxides

Indexed keywords

BENCHMARKING; DIELECTRIC FILMS; DIELECTRIC MATERIALS; GATES (TRANSISTOR); INTEGRATION; OPTIMIZATION; POLYSILICON; SCATTERING; TRANSCONDUCTANCE;

DRIVE CURRENTS; GATE DIELECTRICS; ULTRATHIN OXIDES;

MOSFET DEVICES;

EID: 0347968282     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2003.819251     Document Type: Article

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