Remote charge scattering in MOSFETs with ultra-thin gate dielectrics

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1998, Pages 571-574

  Krishnan, Mahesh S ^a   Yeo, Yee Chia ^a   Lu, Qiang ^a   King, Tsu Jae ^a   Bokor, Jeffrey ^a   Hu, Chenming ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER MOBILITY; CRYSTAL IMPURITIES; DIELECTRIC FILMS; ELECTRON SCATTERING; GATES (TRANSISTOR); SEMICONDUCTING FILMS; ULTRATHIN FILMS;

GATE DIELECTRICS; REMOTE CHARGE SCATTERING (RCS);

MOSFET DEVICES;

EID: 0032284167     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)