Dependence on morphology of oxygen precipitates upon oxygen supersaturation in Czochralski silicon crystals

Journal of the Electrochemical Society

Volumn 144, Issue 9, 1997, Pages 3180-3184

  Fujimori, Hiroyuki ^a  

^a Nissei Bldg   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTAL GROWTH FROM MELT; MORPHOLOGY; OXYGEN; PRECIPITATION (CHEMICAL); SUPERSATURATION; THERMAL EFFECTS; TRANSMISSION ELECTRON MICROSCOPY;

ANNEALING TEMPERATURE; OXYGEN PRECIPITATES;

SILICON WAFERS;

EID: 0031232567     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1837979     Document Type: Article

References (15)

1. K. Tempelhoff and F. Spiegelberg, in Semiconductor Silicon/1977, H. R. Huff and E. Sirtl, Editors, PV 77-2, p. 585, The Electrochemical Society Proceedings Series, Princeton, NJ (1977).
2. Y. Matushita, S. Kishino, and M. Kanamori, Jpn. J. Appl. Phys., 19, L101 (1980).
3. W. A. Tiller, S. Hahn, and F. A. Ponce, J. Appl. Phys., 59, 3255 (1986).
4. F. A. Ponce, T. Yamashita, and S. Hahn, in Defects in Silicon, W. M. Bullis and C. Kimerling, Editors, PV 83-9, p. 105, The Electrochemical Society Proceedings Series, Pennington, NJ (1983).
5. S. Aoki, Jpn. Inst. Met., 56, 494 (1992).
6. K. Sueoka, N. Ikeda, T. Yamamoto, and S. Kobayashi, J. Appl. Phys., 74, 5437 (1993).
7. C. Claeys and H. Bender, in Microscopy of Semiconducting Materials/1985, A. G. Cullis and D. B. Holt, Editors, Vol. 76, p. 451, Adam Hilger Ltd., Bristol (1985).
8. A. Borghesi, B. Pivac, A. Sassella, and A. Stella, J. Appl. Phys., 77, 4169 (1995).
9. F. Shimura and T. Higuchi, Appl. Phys. Lett., 53, 69 (1988).
10. T. Kuroda, T. Irisawa, and A. Ookawa, J. Cryst. Growth, 42, 41 (1977).
11. T. Kuroda and R. Lackman, ibid., 56, 198 (1982).
12. Morphology of Crystals Parts A and B, I. Sunagawa, Editor, Terra Scientific Pub., Co., Tokyo (1987).
13. I. Sunagawa K. Tsukamoto, and T. Yasuda, in Materials Science of the Earth's Interior, I. Sunagawa, Editor, p. 331, Terra Scientific Pub., Co., Tokyo (1984).
14. W. Berg, Proc. Roy. Soc. A, 164, 79 (1938).
15. T. Kobayashi, Philos. Mag., 6, 1363 (1961).