Mechanics of compressive stress evolution during thin film growth

Journal of the Mechanics and Physics of Solids

Volumn 51, Issue 11-12, 2003, Pages 2127-2148

  Guduru, P R ^a   Chason, E ^a   Freund, L B ^a  

^a Brown University   (United States)

Author keywords

Adatom; Grain boundary diffusion; Stress evolution; Thin film

Indexed keywords

COMPRESSIVE STRESS; DIFFUSION; FILM GROWTH; GRAIN BOUNDARIES; REACTION KINETICS; SURFACE CHEMISTRY; TENSILE STRESS; VAPOR DEPOSITION;

STRESS EVOLUTION;

THIN FILMS;

EID: 0345412538     PISSN: 00225096     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmps.2003.09.013     Document Type: Conference Paper

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