Effect of thickness on the piezoelectric properties of lead zirconate titanate films fabricated by aerosol deposition method

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 11 B, 2002, Pages 6669-6673

  Lebedev, Maxim ^a   Akedo, Jun ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Aerosol deposition method; Breakdown voltage; Coercive field; Internal stress; Lead zirconate titanate; Piezoelectric film; Thickness dependence

Indexed keywords

AEROSOL DEPOSITION METHOD; COERCIVE FIELD; INTERNAL STRESS; LEAD ZIRCONATE TITANATE; PIEZOELECTRIC FILM; THICKNESS DEPENDENCE;

AEROSOLS; ELECTRIC BREAKDOWN; FERROELECTRICITY; PIEZOELECTRICITY; ZIRCON;

THIN FILMS;

EID: 0345295668     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.41.6669     Document Type: Article

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