Single process to deposit lead zirconate titanate (PZT) thin film by a hydrothermal method

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 5 SUPPL. B, 1997, Pages 2998-2999

  Morita, Takeshi ^a   Kanda, Takefumi ^a   Yamagata, Yutaka ^b   Kurosawa, Minoru ^a   Higuchi, Toshiro ^a  

^a UNIVERSITY OF TOKYO   (Japan)

^b KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

Hydrothermal method; Piezoelectric material; Piezoelectric transducer; PZT thin film

Indexed keywords

HYDROTHERMAL METHOD; LEAD ZIRCONATE TITANATE;

COMPOSITION; DEPOSITION; LEAD COMPOUNDS; PIEZOELECTRIC MATERIALS;

THIN FILMS;

EID: 0031144345     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.2998     Document Type: Article

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